Validating fast simulation of air damping in micromachined devices

Optimization of the dynamic performance of air-packaged micromachined devices requires accurate estimation of viscous drag forces, but such simulations can be prohibitively time-consuming if the finite element method (FEM) or the finite difference method (FDM) is used. The recently developed precorrected-FFT accelerated boundary element method (BEM) solver FastStokes has made substantial changes to this situation. To further determine the accuracy of the FastStokes solver, the simulation results of the ADXL76 accelerometer and a micro-mirror are discussed in this paper. Close matches between simulation results and testing results prove the efficiency and broad applicability of this fast Stokes flow solver.