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Deposition of High Quality Thin Films Using ECR Plasma( Advanced Techniques of Thin Films)
Deposition of High Quality Thin Films Using ECR Plasma( Advanced Techniques of Thin Films)
2000
Takao Amazawa
Hideo Oikawa
Sigeru Hirono
Seitaro Matsuo
Keywords:
Thin film
Plasma
Metallurgy
Carbon film
Materials science
Analytical chemistry
Ceramic materials
Electron cyclotron resonance
Deposition (law)
Optoelectronics
Correction
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