MEMS electrochemical geophone sensitive electrode chip and manufacturing method thereof

The invention provides an MEMS electrochemical geophone sensitive electrode chip and a manufacturing method thereof. The electrode chip comprises a support substrate, N electrode layers successively arranged on at least one surface of the support substrate, and N-1 insulation spacing layers disposed between two adjacent electrode layers. Positions of M electrode layer through holes (31), M insulation spacing layer through holes (32) and M support substrate through holes (33) are right opposite, a flowing channel of an electrolyte solution is formed, all the insulation spacing layers and the electrodes layers of a sensitive electrode are integrated on the same silicon chip, the structure is simple, the interlayer alignment precision is improved, and the processing technology is simplified; and the thickness of the insulation spacing layers can be controlled to range from several micrometers to hundreds micrometers, adjustment and optimization of device performance are facilitated, the contact area between the electrode layers and the electrolyte solution is greatly increased, and the sensitivity of a single-chip integrated type one-piece sensitive electrode chip is improved.