Method and apparatus for the internal coating of hollow bodies, as well as use of the device
2004
Apparatus for coating the inside of a container (1) by means of plasma enhanced chemical vapor deposition of a reaction product, wherein the container to be coated (1) has a an opening (5) narrowing neck portion, - means for generating a vacuum in the container (1), - having a through opening (5) of the container (1) insertable rod-like gas nozzle (2) for introducing process gas into the container (1) and - means for excitation of the plasma, characterized, in that - the gas lance (2) has a extending on the lance axis main channel (3) of length l - the gas lance (2) comprises at least one from the main channel branching (3) side channel (4) of length l
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI