Study of a high-precision SAW-MOEMS strain sensor with laser optics

A novel structure design of a surface acoustic wave (SAW) micro-optic-electro-mechanical-system (MOEMS) strain sensor with a light readout unit is presented in this paper. By measuring the polarization intensity ratio of the TE/TM mode outputted from the waveguide, the strain produced from an object can be measured precisely. The basic working principle of the SAW MOEMS strain sensor is introduced and the mathematical model of the strain sensor system is established. The SAW characteristics effected by the strain sensor are mathematically deduced. The coupling coefficient between the SAW modes and light modes can be calculated based on the theory of coupling modes. The conversion coefficient of polarized light modes is obtained. Due to the restrictions of the specific parameters of the device, the level of technology and the material characteristics, the sensitivity of the strain sensor system is calculated through simulation as 0.1 μe, with a dynamic range of 0 ~ ±50 μe.