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Formation of High Reliability Hydrogen-free MONOS Cells Using Deuterated Ammonia
Formation of High Reliability Hydrogen-free MONOS Cells Using Deuterated Ammonia
2019
Noguchi Masaki
Abe Junko
Ogawa Yoshihiro
Nakagawa Seiji
Miyajima Hideshi
Isogai Tatsunori
Yamashita Hiroyuki
Sawa Keiichi
Fujitsuka Ryota
Yamanaka Takanori
Okada Shunsuke
Aoyama Tomonori
Aiso Fumiki
Keywords:
Hydrogen
Chemical substance
Ammonia
Deuterium
Inorganic chemistry
Materials science
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