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UV Assisted Densification of Perhydropolysilazane (PHPS) Based Spin-On Glass in High Aspect Ratio Gap Fill Structure
UV Assisted Densification of Perhydropolysilazane (PHPS) Based Spin-On Glass in High Aspect Ratio Gap Fill Structure
2018
Sanjay Mehta
Haifeng Sheng
Rishikesh Krishnan
Bala Haran
Tao Han
Zeynel Bayindir
Marc Berardi
Brett Yatzor
Jinping Liu
Joseph F. Shepard
Stephan Grunow
Keywords:
Aspect ratio (aeronautics)
Materials science
Spin glass
Composite material
Correction
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