Manufacture of High Precision, Multilayer Based Polarimeter Designed for Wide Energy Range from EUV to Soft X-Ray

The development of a high precision five rotation axes polarimeter using transmission multilayers as polarizers and reflection multilayers as analyzers is presented. In order to cover a wide energy range from EUV to soft X-ray, a set of Mo/Si, Cr/C, Sc/Cr, and W/B4C multilayers for transmission and reflection have been designed and fabricated. A hexapod support allows to align the polarimeter easily relative to the optical axis, and the instrument is designed to be moved conveniently between different beamlines.