Non-kinetic Damage on Insulating Materials by Highly Charged Ion Bombardment

Abstract We have measured the damage caused by the impact of low velocity, highly charged ions on insulating surfaces. Atomic force microscopy allows us to observe directly the surface topography with nanometer resolution. Using constant velocity (100 keV) Xe q + ions (25 ⩽ q ⩽ 50) impinging on mica, we observe damage caused by single ion impacts. Impact sites typically are circular hillocks. Within the range and accuracy of the data, the height and volume of the damaged regions are well approximated by a linear function of ion potential energy.