Growth and characterization of thin films of Y2O3, La2O3 and La2CuO4

Abstract Films of Y 2 O 3 , La 2 O 3 , and La 2 CuO 4 were prepared by an ultrasonic nebulization and pyrolysis method using acetylacetonates of the corresponding metals in alcohol solvents as source materials. Homogeneous, uniform films with good adherence have been obtained using this simple technique. As-deposited yttrium and lanthanum oxide films were poorly crystallized. After postannealing in oxygen at higher temperature, they crystallized into cubic and hexagonal phases, respectively. Transparent yttrium and lanthanum oxide films have high electric breakdown voltages. Single phase polycrystalline La 2 CuO 4 thin films were obtained from a source solution with a La:Cu ratio of 2:1.