Old Web
English
Sign In
Acemap
>
Paper
>
Plasma emission correction in reflectivity spectroscopy during sputtering deposition
Plasma emission correction in reflectivity spectroscopy during sputtering deposition
2019
Iryna Gozhyk
Letian Dai
Quentin Hérault
Rémi Lazzari
Sergey Grachev
Keywords:
Analytical chemistry
Spectroscopy
Nuclear magnetic resonance
Sputter deposition
Plasma
Physics
Reflectivity
Atomic physics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
40
References
1
Citations
NaN
KQI
[]