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A Tilt Sensor Using a High-Resolution MEMS Inertial Sensor Fabricated by Multi-Layer Metal Technology
A Tilt Sensor Using a High-Resolution MEMS Inertial Sensor Fabricated by Multi-Layer Metal Technology
2017
Ippei Tsuji
Motohiro Takayasu
Hiroyuki Ito
Daisuke Yamane
Shiro Dosho
Toshifumi Konishi
Noboru Ishihara
Katsuyuki Machida
Kazuya Masu
Keywords:
multi layer
Materials science
Microelectromechanical systems
Tilt sensor
Inertial frame of reference
Optoelectronics
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