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INVESTIGATION OF MACROSCOPIC UNIFORMITY AND IMPROVEMENT USING A GUARD RING DURING CH4/H2 REACTIVE ION ETCHING OF INP
INVESTIGATION OF MACROSCOPIC UNIFORMITY AND IMPROVEMENT USING A GUARD RING DURING CH4/H2 REACTIVE ION ETCHING OF INP
1996
Klemens Janiak
U. Niggebrügge
Keywords:
Dry etching
Reactive-ion etching
Surface roughness
Guard (information security)
Materials science
Analytical chemistry
Correction
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