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Measurement of oxygen concentration in FZ silicon crystal
Measurement of oxygen concentration in FZ silicon crystal
2016
Naohisa Inoue
Masumi Obuchi
Hiroyuki Uno
Keiko Inoue
Kaori Watanabe
Yuichi Kawamura
Keywords:
Radiochemistry
Limiting oxygen concentration
Infrared spectroscopy
Monocrystalline silicon
Chemistry
Analytical chemistry
Materials science
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