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Dielectric antireflective coatings for DUV lithography
Dielectric antireflective coatings for DUV lithography
1997
C. Bencher
C. Ngai
B. Roman
S. Lian
T. Vuong
Keywords:
Nanotechnology
Dielectric
Optoelectronics
Lithography
Anti-reflective coating
Materials science
Integrated circuit
antireflection coating
Correction
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