Apparatus for depositing a coating on a flat substrate
2002
This device for depositing a coating on a flat substrate (9) includes an evaporation source (28) and a distribution system (46, 40) for feeding a vaporized material on the substrate and which contains a linear source evaporation (48), said source (48) and the substrate (9) being movable relative to the autre.Application particular for the manufacture of flat panel displays comprising organic light emitting diodes.
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KQI