Old Web
English
Sign In
Acemap
>
Paper
>
Highly sensitive focus monitoring on production wafer by Scatterometry Measurements for 90/65nm node devices
Highly sensitive focus monitoring on production wafer by Scatterometry Measurements for 90/65nm node devices
2006
Kawachi
Fudo
Tasaka
Matsumoto
Sasazawa
Nakamura
Keywords:
Nondestructive testing
production
Node (networking)
Computer hardware
Wafer
Computer science
Focus (computing)
highly sensitive
Correction
Source
Cite
Save
Machine Reading By IdeaReader
2
References
2
Citations
NaN
KQI
[]