An Improved Measurement System for the Investigation of Sensitive Specimens by Means of Scanning Electron Acoustic Microscopy (SEAM)

In contrast to other modes of Scanning Electron Microscopy (SEM) SEAM usually necessitates high electron beam currents to achieve a sufficient signal—to—noise ratio. In addition, for taking a SEAM—micrograph being the main use of this method in order to detect specimen inhomogeneities, high irradiation times of the specimen are necessary. Due to the fact that specimens are thermally, mechanically, and electrically loaded a damage of sensitive specimens like semiconductor devices or plastic materials cannot be excluded. In order to reduce the radiation dose an improvement of both the detection technique and the signal acquisition is necessary.