Synthesis of carbon nanoparticles in combined RF-DC plasma

Abstract In this work carbon nanoparticles were synthesized in combined RF-DC plasma. To synthesize carbon particles a graphite target was used. The time of synthesis of carbon particles was fixed using a self-bias voltage (V dc ). The SEM image and the chemical composition of the samples were obtained, and the particle size distribution was constructed. SEM images show synthesized spherical nanoparticles with diameters from 80 to 500 nm in dependence on plasma parameters. Self-bias voltage dependence on time at different plasma parameters (gas pressure and discharge power) has been obtained. The graph of particle synthesis time and DC voltage was shown. It was determined that the increase of DC voltage leads to the decreasing of particle synthesis time. Thus, one can conclude that growth of particles in plasma medium can be controlled by DC voltage value.