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Realization of closed-loop epitaxial thin-film growth optimization of superconducting TiN via machine learning
Realization of closed-loop epitaxial thin-film growth optimization of superconducting TiN via machine learning
2021
Isao Ohkubo
Zhufeng Hou
Ji-Yeon Lee
Takashi Aizawa
Mikk Lippmaa
Toyohiro Chikyow
Koji Tsuda
Takao Mori
Keywords:
Realization (systems)
Materials science
Molecular beam epitaxy
epitaxial thin film
transition metal nitrides
Tin
Optoelectronics
closed loop
Superconductivity
Correction
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