A Fast Method of Fully Characterizing Sputtering Angular Dependence (Preprint)

Abstract : A new method has been demonstrated in which a single experiment is used to fully define the sputtering angular dependence of a given material. The method subjects a circular rod of test material to a mono-energetic and highly collimated ion beam. The eroded profile is then measured using optical profilometry; the full sputtering angular dependence curve is then extracted using a numerical approach.