Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier-injection structures

We demonstrate a monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators. The integrated device perform wavelength demultiplexing in 16 channels and provide high-speed power-level adjustment with a response of <15 ns in each channel.