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Impact of electrostatic effects on wet etching phenomenon in nanoscale region
Impact of electrostatic effects on wet etching phenomenon in nanoscale region
2017
Atsushi Okuyama
Suguru Saito
Yoshiya Hagimoto
Hayato Iwamoto
Kenji Nishi
Ayuta Suzuki
Takayuki Toshima
Keywords:
Dry etching
Double layer (surface science)
Nanoscopic scale
Reactive-ion etching
Etching (microfabrication)
Nanotechnology
Composite material
Phenomenon
Materials science
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