Process developmengt for fabricating low- and high-voltage CMOS devices into LCD drivers

As Liquid Crystal Displays (LCDs) have declined in price, this has resulted in pressure for LCD driver ICs to come down in price. This paper reviews authors' recent work to develop a low-cost CMOS process for fabricating low- and high-voltage CMOS devices into LCD driver. More specifically, their effort has been to develop common CMOS process that can be applied to both low-voltage and high-voltage transistors concurrently, thus reducing the number of CMOS process steps for fabricating low- and high-voltage CMOS devices. Also, by lowering the annealing temperature of high-voltage CMOS process, authors have succeeded in shrinking the cell size of high-voltage transistors