An AI Based Controller for Temperature Control for a Hot Embossing System

The hot embossing microreplication microfabrication, HEMM, systems are gaining popularity in the MEMS and more specifically the BioMEMS area due to their capability to quickly and inexpensively replicate microstructures on various types of polymers or used for thermal bonding of BioMEMS substrates. Control issues associated with a HEMM system include temperature, heat and force control for process control. This manuscript discussed the procedure for the development of an artificial intelligence based controller using neural networks and fuzzy logic with application to the heating and temperature control of a HEMM system. Subsequently, the controller development in LabVIEW and MATLAB, and its implementation and performance verification on a testbed is presented