Dynamic Behavior of T-beam Resonator With Repulsive Actuation

Electrostatic MEMS transducer driven by repulsive force is an attractive possibility and has advantages of avoiding the pull-in instability, tuning the natural frequency, and achieving high sensitivity by applying high enough voltages. In this work, a “T”-shaped beam, which is formed by attaching a secondary beam perpendicular to a primary cantilever at the tip, is introduced and its nonlinear dynamics is analyzed. A reduced-order model is derived from mode shapes formed from electromechanical coupling effects respectively. Generalized forms of forced Mathieu equation of motion are derived, and then, dynamic behaviors are investigated through the theory of multiple scales. The resonant responses, including both primary and principal parametric resonances, reveal softening behavior originating from quadratic and cubic nonlinearities in the governing equation. The behavior of the T-beam is compared with traditional cantilever structure. The resonance under repulsive force demonstrates that the T-beam has several advantages over a traditional cantilever: Lower natural frequency but higher resonant responses can improve the signal-to-noise ratio; with an attached micropaddle, the T-beam has a larger surface for absorption of targeted analytes for mass sensing. We conclude that an electrostatic MEMS resonator with a “T”-shaped beam is potentially appropriate for the new generations of sensors and actuators.