Mechanical and Tribological Properties of Chromium-Nitrogen Films Deposited by Ion Beam Assisted Deposition

Mechanical and tribological properties of chromium-nitrogen films deposited by ion beam assisted deposition (IBAD) were investigated. The films were deposited reactively, i.e., via chromium evaporation with concurrent nitrogen ion beam bombardment, on stainless steel substrates at low deposition temperatures (<200 C). Two primary deposition regimes, with differing Cr/N atom-to-ion arrival ratios, were investigated: approximately 0.8--1.0 and 2.5--3.0. Rutherford Backscattering Spectroscopic analysis showed the lower arrival ratio films to be essentially stoichiometric CrN, whereas films deposited at higher arrival ratios were Cr-rich with Cr/N ratios of about 3:1. Both films were fine grained polycrystalline (typically 5--20 nanometer crystal dimension). The stoichiometric films were approximately two times harder than the Cr-rich films, based on nanohardness indentation measurements, and possessed higher residual stress levels. Both film types substantially improved the wear resistance of stainless steel disks, based on the results of ball-on-disk wear tests against ruby balls. The best performance was obtained with Cr-rich-films, which exhibited a very low wear rate and lower friction than either the stoichiometric film or the uncoated steel.