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Direct Fabrication of 3D Periodic Inorganic Microstructures using Conformal Phase Masks
Direct Fabrication of 3D Periodic Inorganic Microstructures using Conformal Phase Masks
2009
Matthew C. George
Erik C. Nelson
John A. Rogers
Paul V. Braun
Keywords:
Nanotechnology
Microstructure
Nanolithography
Silsesquioxane
Periodic graph (geometry)
Chemistry
Inorganic chemistry
Conformal map
Fabrication
Correction
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