Effect of ultraviolet light on fatigue of lead zirconate titanate thin‐film capacitors

Fatigue of Pb(Zr0.52Ti0.48)O3 (PZT) thin‐film capacitors was studied under UV light (He‐Cd laser, λ=325 nm). The remanent polarization of the PZT film capacitors increased upon light illumination. Fatigue resistance was also improved under UV light. During fatigue test, the change in polarization of PZT films upon UV light illumination increased gradually with cycling. These results were examined within the framework of the polarization screening model, which is suggested as an essential process for fatigue. This leads to a conclusion that more charged defects are involved in the fatigue process through internal screening of polarization.