Selective laser induced autocatalytic metallization of NiO and Cr2O3 doped alumina zirconia ceramic substrates

Abstract In this study slip cast alumina-zirconia materials were doped with nickel oxide and chromium oxide and sintered in air. Chromium oxide forms a solid solution while nickel oxide forms spinel with alumina. The sintered substrates were selectively irradiated with a green, ps pulsed Nd:YVO4 laser. During subsequent autocatalytic plating, copper was deposited selectively on laser-irradiated surfaces. It is assumed that under the irradiation influence at very high temperatures metal or lower valence oxides are produced which initiate the growth of copper crystallites during the plating process. The process offers the opportunity to manufacture 3D integrated circuit carriers with ceramic substrates, which offer superior strength, thermal stability and heat conductivity compared to polymers. Single dopant or co-dopant contents of