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Efficiency of production of Xe 2 * and Kr 2 * excimer molecules in microwave discharge plasmas
Efficiency of production of Xe 2 * and Kr 2 * excimer molecules in microwave discharge plasmas
1998
A. V. Dem’yanov
Igor'V. Kochetov
Dennis Lo
Keywords:
Molecule
Atomic physics
Microwave
Excimer
Plasma
Materials science
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