RBS-Channeling Analysis as a Powerful Tool to Study the Crystal Structure of Materials

The Ion Beam Techniques have opened a new window to study crystal structures and imperfections of crystals. In this paper, we try to briefly describe concepts and applications of RBS-Channeling to determine crystal parameters and disorders. Some experimental results of the analysis of semiconductor materials are presented in this paper, which has been obtained by means of RBS-Channeling technique.