Loadport for semiconductor processing apparatus

PURPOSE: A loadport for semiconductor processing apparatus is provided to detect a loading state of a cassette loaded on the load port by forming a loading sensor and a kinematic coupling portion in the load port. CONSTITUTION: A loadport(200) has a flat surface. A bottom part of a cassette is loaded on the flat surface of the loadport(200). Three kinematic coupling portions(210) are formed on the flat surface of the loadport(200). Three coupling grooves are formed on the bottom part of the cassette. The coupling grooves of the cassette are combined with the kinematic coupling portions(210) of the loadport(200). A loading sense portion is installed in the kinematic coupling portions(210) in order to detect a loading state of the cassette. The loading sense portion is formed with a plurality of loading sensors(220).