Parallel-kinematics XYZ MEMS part 1: Kinematics and design for fabrication

Abstract Micro- and nanopositioning systems are widely used in the field of nanotechnology for probing, imaging, and increasingly for processing. This two-part set of papers presents a MEMS-scale parallel-kinematics mechanism, designed to achieve pure spatial ( X , Y and Z ) translation. With three independent kinematic chains connecting the end-effector to the base, a fully functional mechanism with axis actuation and displacement sensing is realized in a double device layer (“oreo”) SOI wafer using only conventional, microfabrication processes. This paper, the first in a two paper set, presents the mechanism, specially designed for scalable microfabrication. It analyzes its kinematics and dynamics, and characterizes its workspace. Part II of this set of papers describes the detailed design, fabrication, characterization and control of the devices.