Combined impact of 500 keV protons and oxygen plasma on polyimide films

Abstract This paper presents results of experimental investigation of combined impact of 500 keV protons with fluences of 10 15 –10 16  cm −2 and oxygen plasma with fluences of (0.8–3.5) 10 20  cm −2 on polyimide films. Measured UV–vis transmission, Raman and XPS spectra of polyimide specimens before and after combined impact and data on the sample mass losses as a result of erosion due to oxygen plasma exposure are given. On the base of the obtained spectroscopic results, the changes in the polyimide structure caused by the proton and oxygen irradiation are analyzed and discussed.