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Micro-Raman Characterization of Cluster Carbon Implanted Si before and after Rapid Thermal Annealing
Micro-Raman Characterization of Cluster Carbon Implanted Si before and after Rapid Thermal Annealing
2016
Woo Sik Yoo
Kitaek Kang
Hiroshi Nishigaki
Noriyuki Hasuike
Hiroshi Harima
Masahiro Yoshimoto
Karuppanan Sekar
Keywords:
Raman spectroscopy
Annealing (metallurgy)
Carbon
Analytical chemistry
Materials science
Chemical engineering
rapid thermal annealing
micro raman
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