Purge module and the load port, including it

The invention relates to grant purge function to an existing load port, also provides a deposited load port of the purge module and such purge module is adaptable to various types of wafer carriers. A Such purge module includes a jig (JIG), gas control box and pipe. The jig is mounted so as to be detachable to the stage top of the load port (LOADPORT), including gas discharge port for discharging the gas inlet and wafer carrier inside the gas injecting gas into the wafer carrier. It said gas control box is mounted on the load port to control the injected gas and ejected by the gas. The pipe connecting the jig and the gas control box. .FIELD 1