The utilization of saturated gas-solid reactions in the preparation of heterogeneous catalysts

Abstract Saturated gas-solid reactions known from Atomic Layer Epitaxy (ALE) were used to processvarious catalysts. Good homogeneity of metal species was verified both along the entire catalyst bed and inside the particles. A variety of volatile metal compounds including metal chlorides, alkoxides and β-diketonates were successfully used as reactants. The ALE processing is described with reference to examples demonstrating the achievement of surface saturation, reproducibility of processes, selection of process parameters, growth of oxides to modify the support and the binding of two metal compounds.