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Thin-Film Air Flow Sensors for Automotive using the MEMS Technologies
Thin-Film Air Flow Sensors for Automotive using the MEMS Technologies
2015
Takamoto Furuichi
Takashige Nagao
Hisanori Yokura
Ryuichirou Abe
Shigemitsu Fukatsu
Keywords:
Thin film
Resistor
Airflow
Semiconductor
Microelectromechanical systems
Materials science
Electronic engineering
Automotive industry
Electrical engineering
Engineering physics
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