Synthesis of β-ketoiminate and β-iminoesterate tungsten (VI) oxo-alkoxide complexes as AACVD precursors for growth of WOx thin films

Abstract The tungsten (VI) oxo-alkoxide complexes WO(OR) 3 L [R =  t Bu; L = acNac, etNac, tbNac, acNac Me , acNac Et ] ( 1 – 5 ) and WO(OCH 3 ) 3 (acNac) ( 6 ) have been synthesized. The isomeric purity of these complexes depends on the steric bulk of the substituent on the imino nitrogen of the chelating ligand. The thermal properties of the complexes have been evaluated to assess the effect of the β-ketoiminate or β-iminoesterate ligands. WO(OC(CH 3 ) 3 ) 3 (acNac) ( 1 ) has been used as a precursor for aerosol assisted chemical vapor deposition (AACVD) of WO x thin films at temperatures from 250 to 450 °C. The results of mass spectrometry and thermolysis studies have been used to propose possible precursor decomposition pathways during film deposition.