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Fast expanding plasma beam deposition of C and Si-thin layers
Fast expanding plasma beam deposition of C and Si-thin layers
1993
Dc Daan Schram
J. W. A. M. Gielen
Ajm Buuron
Gj Gijs Meeusen
S.N. Doumtchenko
P.d. Haaland
M.C.M. van de Sanden
Keywords:
Thin layers
Deposition (law)
Materials science
plasma beam
Optoelectronics
Correction
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