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Atomic Layer Deposition of NbN and Nb(Si)N for Metal Electrodes
Atomic Layer Deposition of NbN and Nb(Si)N for Metal Electrodes
2006
Hannu Huotari
Suvi Haukka
Raija Matero
Antti Rahtu
Eva Tois
Marko Tuominen
Keywords:
Electrode
Atomic layer deposition
Materials science
Metal
Inorganic chemistry
Analytical chemistry
metal electrodes
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