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Scaling MOSFETs with Self-aligned Super-Steep-Retrograded Halo (3SRH)
Scaling MOSFETs with Self-aligned Super-Steep-Retrograded Halo (3SRH)
2011
Binneng Wu
Weiping Xiao
Huilong Zhu
Qingqing Liang
Hao Wu
Haizhou Yin
Zhijiong Luo
Hongyu Yu
Dapeng Chen
Tianchun Ye
Keywords:
Halo
Particle physics
Scaling
Physics
Condensed matter physics
Materials science
Correction
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