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Microfluidic Flow Rate Sensor Using Electron Cloud Plasma Transport within Silicon Microring Circuits
Microfluidic Flow Rate Sensor Using Electron Cloud Plasma Transport within Silicon Microring Circuits
2021
A. E. Arumona
Anita Garhwal
M. Bunruangses
Nithiroth Pornsuwancharoen
Kanad Ray
Phichai Youplao
Iraj Sadegh Amiri
Preecha P. Yupapin
Keywords:
Optoelectronics
Volumetric flow rate
Microfluidics
Materials science
Electronic circuit
Silicon
Atomic orbital
Plasma
Correction
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