Amorphous Metal/Oxide Nanolaminate
2010
Bilayers of sputtered amorphous multicomponent metal films (AMMFs) and solution deposited amorphous oxide films have been reproducibly deposited with varying thicknesses of 20, 25, and 30 nm to form ordered nanolaminates. Interdiffusion is observed at the AMMF-oxide boundary, leading to unique interface chemistries that are dictated by the nature and order of the deposition processes.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
13
References
12
Citations
NaN
KQI