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Effect of Sr(OH)2 as a pH Regulator on Different Plane Sapphire Substrate Chemical Mechanical Polishing
Effect of Sr(OH)2 as a pH Regulator on Different Plane Sapphire Substrate Chemical Mechanical Polishing
2019
Da Yin
Xinhuan Niu
Liu Yang
Kai Zhang
Jianchao Wang
Yaqi Cui
Ru Wang
Keywords:
Substrate (chemistry)
Inorganic chemistry
Sapphire
Chemical-mechanical planarization
Regulator
Chemistry
sapphire substrate
Correction
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