Bulk piezoelectric MEMS harvesters operating at low frequency for energy autonomous systems

Keywords: vibrational energy harvesting ; piezoelectric energy harvester ; low-frequency ; resonant ; impact ; wafer level fabrication ; lead zirconate titante (PZT) ; bulk PZT ; thinned PZT ; plucking ; frequency up-conversion ; rotating gear ; oscillating mass-gear system These Ecole polytechnique federale de Lausanne EPFL, n° 6306 (2014)Programme doctoral Microsystemes et MicroelectroniqueFaculte des sciences et techniques de l'ingenieurInstitut de microtechniqueLaboratoire de capteurs, actuateurs et microsystemesJury: Prof. H. Shea (president) ; Prof. N. de Rooij, Dr D. Briand (directeurs) ; Prof. S. Basrour, Prof. P.-A. Farine, Prof. V. Ferrari (rapporteurs) Public defense: 2014-8-22 Reference doi:10.5075/epfl-thesis-6306Print copy in library catalog Record created on 2014-08-11, modified on 2016-08-09