Inverted multi-junction solar cell and manufacturing method thereof

The invention discloses an inverted multi-junction solar cell and a manufacturing method thereof. The manufacturing method particularly comprises the following steps: (1) providing a growth substrate for the epitaxial growth of a semiconductor material; (2) putting the growth substrate in an MOCVD device, and inversely growing a first epitaxial structure on the substrate by adopting an MOCVD method, wherein the first epitaxial structure is provided with a multi-junction subcell lamination; and (3) transferring the structure into an MBE device, and inversely forming a second epitaxial structure on the MBE device by adopting an MBE method, wherein the MBE device at least comprises a one-junction subcell so as to form a serial inverted multi-junction solar cell. A band gap of the first epitaxial structure is more than that of the second epitaxial structure.