Armature coil electromagnetic actuator, an electromagnetic actuator, an exposure apparatus, and device manufacturing method

Configure the X-axis linear motor stator, the armature coil (60) for generating a magnetic field by energization is made of copper, strip-shaped conductive layer wound around a predetermined winding shaft (62a), the conductive layer provided between opposing surface portion of (62a), a conductive layer facing (62a) strip-shaped insulating layer to electrically insulate the mutual and (62b), the conductive layer insulating layer opposing faces of (62a) (62b ) through and a bonding layer for bonding (62c).