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OPTIMIZATION OF OPTICAL CHANNEL OF SCANNING LASER NANOLITHOGRAPHER FOR WRITING ON PHOTO- AND THERMO-SENSITIVE MATERIALS
OPTIMIZATION OF OPTICAL CHANNEL OF SCANNING LASER NANOLITHOGRAPHER FOR WRITING ON PHOTO- AND THERMO-SENSITIVE MATERIALS
2019
V. P. Korolkov
Andrey G. Sedukhin
Anton Kachkin
Andrey Elisafenko
Keywords:
Optoelectronics
Communication channel
Laser
Materials science
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